EE 354: Very Large Scale Integrated (VLSI) Circuits

    EE 354: Very Large Scale Integrated (VLSI) Circuits 

SPRING 2026

Instructor:	Dr. Ahmed Farghal, Ph.D. Office:  E-mail: ahmedfarghal7080@gmail.com Facebook: Click here Scheduled Office Hours: TBD. Open Door Policy: When my door is open, you are welcome to come in.
Course Organization:	Lecture: Saturdays, 01:00 pm – 03:00 pm, @ Room 203. 2 hours of tutorial per week Teaching Assistant: Eng.
Midterm Exam:	TBD.
Final Exam:	TBD.

Required Textbook:

 

Optional Reading:

Course Topics:

   Handouts: Spring 2026

The handouts are available as Adobe PDF files through the links below.   

• Lecture 1: VLSI Introduction.
• Lecture 2: VLSI Types and Moore’s Law.
• Lecture 3: VLSI - Wafer Preparation. (Video 1) (Video 2)
• Lecture 4: VLSI - Oxidation of Silicon I.
• Lecture 5: VLSI - Oxidation of Silicon II.
• Lecture 6: VLSI - Dopant Diffusion I. (Video 1) (Video 2)
• Lecture 7: VLSI - Dopant Diffusion II.
• Lecture 8:  Measurement of electrical characteristics.
• Lecture 9:  Ion implantation.
• Lectures 10:  Photolithography.

Handouts: Spring 2025 (Old Materials)

The handouts are available as Adobe PDF files through the links below.   

• Lecture 1: VLSI Introduction.
• Lecture 2: VLSI Types  and Moore’s Law.
• Lecture 3: VLSI - Wafer Preparation.
• Lecture 4: VLSI - Oxidation of Silicon I.
• Lecture 5: VLSI - Oxidation of Silicon II.
• Lecture 6: VLSI - Dopant Diffusion I. (Video 1) (Video 2)
• Lecture 7: VLSI - Dopant Diffusion II.
• Lecture 8:  Measurement of electrical characteristics.
• Lecture 9:  Ion implantation.
• Lectures 10:  Photolithography.

Handouts: Spring 2024 (Old Materials)

The handouts are available as Adobe PDF files through the links below.   

• Lecture 1: VLSI Introduction.
• Lecture 2: VLSI Types  and Moore’s Law.
• Lecture 3: VLSI - Wafer Preparation.
• Lecture 4: VLSI - Oxidation of Silicon I.
• Lecture 5: VLSI - Oxidation of Silicon II.
• Lecture 6: VLSI - Dopant Diffusion I.
• Lecture 7: VLSI - Dopant Diffusion II.
• Lecture 8:  Measurement of electrical characteristics.
• Lecture 9:  Ion implantation.
• Lectures 10 and 11:  Photolithography.
• Lectures 12:  Photolithography.

Useful Links

• How are Microchips Made?